Publication:
Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-6182-0147 | |
| cris.virtual.orcid | 0000-0002-7848-0492 | |
| cris.virtual.orcid | 0000-0002-3955-0638 | |
| cris.virtual.orcid | 0000-0002-2526-3873 | |
| cris.virtual.orcid | 0000-0001-5018-4539 | |
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| cris.virtualsource.department | 6bdcc60f-7ae5-42d4-addd-85ee458d77ce | |
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| cris.virtualsource.department | 81d20142-643b-4ea2-8f89-390fd699ef91 | |
| cris.virtualsource.orcid | 43d958a1-0cae-4e96-b7f9-d08113571840 | |
| cris.virtualsource.orcid | 6bdcc60f-7ae5-42d4-addd-85ee458d77ce | |
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| cris.virtualsource.orcid | bb01fd76-ee52-4074-815c-d27741a82c2a | |
| cris.virtualsource.orcid | 81d20142-643b-4ea2-8f89-390fd699ef91 | |
| dc.contributor.author | Fohn, Corinna | |
| dc.contributor.author | Zharfan, F. | |
| dc.contributor.author | Chery, Emmanuel | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.date.accessioned | 2025-11-27T15:37:02Z | |
| dc.date.available | 2025-11-27T15:37:02Z | |
| dc.date.createdwos | 2025-10-18 | |
| dc.date.issued | 2025-01-01 | |
| dc.identifier.doi | 10.1109/IRPS48204.2025.10982827 | |
| dc.identifier.isbn | 979-8-3315-0478-6 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58472 | |
| dc.language.iso | eng | |
| dc.publisher | IEEE | |
| dc.source.conference | 2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS | |
| dc.source.conferencedate | 2024-03-25 | |
| dc.source.conferencelocation | Monterey | |
| dc.source.journal | 2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS | |
| dc.source.numberofpages | 8 | |
| dc.subject.keywords | HFO2 | |
| dc.subject.keywords | (100)SI | |
| dc.subject.keywords | HFALO | |
| dc.title | Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.identified.status | Library | |
| imec.internal.crawledAt | 2025-10-22 | |
| imec.internal.source | crawler | |
| Files | ||
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