Browsing by Author "Zimmerman, R."
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Publication Application of a new approach to optical proximity correction
;Rosenbusch, A. ;Hourd, A. ;Juffermans, Casper ;Kirsch, H. ;Lalanne, F. ;Maurer, W.Romeo, C.Proceedings paper1999, Optical Microlithography XII, 17/03/1999, p.639-647