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Browsing by Author "Ziryanov, S.M."

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    1-D model of OSG low-k films modification by EUV/VUV emission

    Rakhimova, T.V.
    ;
    Rakhimov, A.T.
    ;
    Mankelevich, Y.A.
    ;
    Lopaev, D.V.
    ;
    Ziryanov, S.M.
    ;
    Kovalev, A.S.
    Meeting abstract
    2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013

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