Browsing by Author "Ziryanov, S.M."
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Publication 1-D model of OSG low-k films modification by EUV/VUV emission
;Rakhimova, T.V. ;Rakhimov, A.T. ;Mankelevich, Y.A. ;Lopaev, D.V. ;Ziryanov, S.M.Kovalev, A.S.Meeting abstract2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013