Publication:

1-D model of OSG low-k films modification by EUV/VUV emission

Date

2013
Meeting abstract
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Author(s)

Rakhimova, T.V.
;
Rakhimov, A.T.
;
Mankelevich, Y.A.
;
Lopaev, D.V.
;
Ziryanov, S.M.
;
Kovalev, A.S.
;
Vasil'eva, A.N.
;
Proshina, O.V.
;
Braginsky, O.V.
;
Kurchikov, K.
;
Baklanov, Mikhaïl

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