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Browsing by Author "Zistl, C."

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    Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films

    Iacopi, Francesca
    ;
    Zistl, C.
    ;
    Jehoul, Christiane  
    ;
    Tokei, Zsolt  
    ;
    Le, Quoc Toan  
    ;
    Das, Arabinda
    Journal article
    2002, Microelectronic Engineering, (64) 1_4, p.351-360

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