Browsing by Author "Zou, Gang"
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Publication Elimination of HF-last cleaning related CoSi2 defects formation
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.177-180Publication Improvement and evaluation of drying techniques for HF-last wafer cleaning
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.167-170Publication Improvement of high temperature water rinsing and drying for HF-last wafer cleaning
Journal article1996, Journal of the Electrochemical Society, (143) 1, p.233-237