Browsing by Author "Zuniga, Christian"
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Publication 3D Mask modeling for EUV lithography
Proceedings paper2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.832224Publication Modeling laser bandwidth for OPC applications
Proceedings paper2009, Optical Microlithography XXII, 22/02/2009, p.72741O