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Browsing by Author "Zuniga, Christian"

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    3D Mask modeling for EUV lithography

    Mailfert, Julien  
    ;
    Zuniga, Christian
    ;
    Philipsen, Vicky  
    ;
    Adam, Konstantinos
    ;
    Lam, Michael
    Proceedings paper
    2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.832224
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    Modeling laser bandwidth for OPC applications

    Zuniga, Christian
    ;
    Adam, Kostas
    ;
    Lam, Michael
    ;
    Lalovic, Ivan
    ;
    De Bisschop, Peter  
    Proceedings paper
    2009, Optical Microlithography XXII, 22/02/2009, p.72741O

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