Browsing by Author "Zuurbier, Nadia"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Limitation of EUV single exposure on DRAM applications: learning and challenges
Oral presentation2022-06-15, ASML Technology Conference 2022Publication Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithography
Proceedings paper2021, Advances in Patterning Materials and Processes XXXVIII, 21/02/2021, p.1161204