Browsing by Author "de Backer, E."

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Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing

Ackaert, J.
;
de Backer, E.
;
Coppens, P.
;
Creusen, Martin
Oral presentation
1999, 1st European Symposium on Plasma Process Induced Damage (ESPID'1); 25-26 November 1999; Toulouse, France.
Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide

Zhichun, Wang
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Ackaert, J.
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Salm, C.
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de Backer, E.
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Van den Bosch, Geert
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Zawalski, Wade
Proceedings paper
2002, Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA, 8/07/2002, p.242-245
Wafer bevel protection during deep reactive ion etching

Charavel, Remy
;
Gassot, Pierre
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de Backer, E.
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Altamirano Sanchez, Efrain
;
Van Aelst, Joke
Oral presentation
2010, 13th Technical and Scientific Meeting of ARCSIS : 'Manufacturing Challenges in European Semiconductor Fabs'
Water-assisted positive ion contamination resulting in charge loss in nonvolatile memories

Gassot, P.
;
Iline, A.
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de Backer, E.
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Tack, Marnix
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Wellekens, Dirk
;
Van Houdt, Jan
;
Haspeslagh, Luc
Proceedings paper
2000, Proceedings of the 30th European Solid-State Device Research Conference - ESSDERC, 11/09/2000, p.268-271