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Browsing by Author "de Boer, M. J."

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    Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon

    Walker, M. J.
    ;
    de Boer, M. J.
    ;
    Jansen, Henri
    Proceedings paper
    2001, MEMS Design, Fabrication, Characterization and Packaging; 1 June 2001; Edinburgh, Scotland.

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