Browsing by Author "de Boer, M. J."
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Publication Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon
;Walker, M. J. ;de Boer, M. J.Jansen, HenriProceedings paper2001, MEMS Design, Fabrication, Characterization and Packaging; 1 June 2001; Edinburgh, Scotland.