Publication:
Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon
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1940 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-11
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Metrics
Views
1940 since deposited on 2021-10-14
3last month
Acq. date: 2025-12-11
Citations