Browsing by Author "de Pablo, Juan"
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Publication Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Journal article2016, Journal of Applied Crystallography, 49, p.823-834Publication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241NPublication Influence of homopolymer addition in templated assembly of cylindrical block copolymers
Journal article2019, ACS Nano, (13) 4, p.4073-4082Publication Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.90510KPublication Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
Proceedings paper2018, Novel Patterning Technologies 2018, 25/02/2018, p.105840KPublication Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions
Journal article2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 3, p.31203Publication The effects of surface topography of nanopatterned substrates on the Directed Self Assembly of block copolymers
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015