Browsing by Author "de Poortere, Etienne"
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Publication Advanced EUV patterning of 2D TMDs for CMOS integration
Publication AI-enabled cross-domain image analysis for high-NA via defect quantification in random logic via arrays
Proceedings paper2026, Metrology, Inspection, and Process Control XL;, 2026-02-22, p.139811VPublication Validation of imaging benefits of Dual Monopole exposures
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275006