Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "de Simone, Danilo"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV

    Fallica, Roberto  
    ;
    Mahne, Nicola
    ;
    Conard, Thierry  
    ;
    Vanleenhove, Anja  
    ;
    de Simone, Danilo
    Journal article
    2023, ACS APPLIED MATERIALS & INTERFACES, (15) 29, p.35483-35494

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings