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Browsing by Author "de Theije, Femke"

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    Characterisation of JSR's spin-on hardmask FF-02

    Das, Arabinda
    ;
    Le, Quoc Toan  
    ;
    Furukawa, Yukiko
    ;
    Nguyen Hoang, Viet
    ;
    Terzieva, Valentina  
    Journal article
    2003, Microelectronic Engineering, (70) 2_4, p.308-313

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