Browsing by Author "de Winter, Laurens"
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Publication Experimental verification of phase induced mask 3D effects in EUV imaging
Proceedings paper2015, International Symposium on Extreme Ultraviolet Lithography - EUVL, 5/10/2015Publication Mask 3D effect mitigation by source optimization and assist feature placement
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications
Proceedings paper2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.1151713Publication Wafer based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings
; ; de Winter, LaurensJournal article2014, Applied Optics, (53) 12, p.2562-2582