Browsing by Author "kwakman, L.F.T."
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Publication A HF vapour etch process for integration in cluster-tool processes: characteristics and applications
;Vermeulen, W.J.C. ;kwakman, L.F.T. ;Werkhoven, C.J. ;Granneman, E.H.A.Verhaverbeke, StevenProceedings paper1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.241-252