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Browsing by Author "kwakman, L.F.T."

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    A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

    Vermeulen, W.J.C.
    ;
    kwakman, L.F.T.
    ;
    Werkhoven, C.J.
    ;
    Granneman, E.H.A.
    ;
    Verhaverbeke, Steven
    Proceedings paper
    1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.241-252

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