Publication:

A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Date

1994

Proceedings Paper

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Files

29573.pdf 557.53 KB

Author(s)

Vermeulen, W.J.C.

;

kwakman, L.F.T.

;

Werkhoven, C.J.

;

Granneman, E.H.A.

;

Verhaverbeke, Steven

;

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