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Browsing by Author "soon aik, chew"

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    TiN/TaN selective etch in replacement metal gate with chlorine based plasmas

    Tao, Zheng  
    ;
    Paraschiv, Vasile  
    ;
    Dekkers, Harold  
    ;
    Dangol, Anish  
    ;
    soon aik, chew
    Meeting abstract
    2014, Plasma Etch and Strip in Microtechnology - PESM, 12/05/2014

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