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Browsing by Author "van Dijk, Kitty"

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    Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers

    Houssa, Michel  
    ;
    Degraeve, Robin  
    ;
    Pomarede, C.
    ;
    van Dijk, Kitty
    ;
    Werkhoven, Chris
    ;
    Mertens, Paul  
    Oral presentation
    1999, 30th IEEE Semiconductor Interface Specialists Conference

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