Publication:
Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
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1893 since deposited on 2021-10-06
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Acq. date: 2025-10-24
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Views
1893 since deposited on 2021-10-06
405item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations