Browsing by Author "van Hemmen, J.L."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels
Proceedings paper2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 12/10/2008, p.671-685Publication Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels
Meeting abstract2008, 214th ECS Meeting, 12/10/2008, p.2449