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Browsing by Author "van Nuenen, Cas"

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    Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

    Mulder, Melchior
    ;
    Engelen, Andre
    ;
    Noordman, Oscar
    ;
    Streutker, Gert
    ;
    van Drieenhuizen, Bert
    Proceedings paper
    2010, Optical Microlithography XXIII, 21/02/2010, p.76401P

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