Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "van Oorschot, Dorothe"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Patterning options for N7 logic : Prospects and challenges for EUV

    van Setten, Eelco
    ;
    Wittebrood, Friso
    ;
    Psara, Eleni
    ;
    van Oorschot, Dorothe
    ;
    Philipsen, Vicky  
    Proceedings paper
    2015, 31st European Mask and Lithography Conference, 22/06/2015, p.96610G

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings