Browsing by Author "van Oosten, Anton"
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Publication Experimental verification of high-NA imaging simulations using SHARP
;Davydova, Natalia ;Liu, Fei ;Benk, Markus ;van Setten, EelcoBottiglieri, GerardoProceedings paper2020, Conference on Extreme Ultraviolet Lithography, SEP 21-25, 2020