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Browsing by Author "van Praagh, Judith"

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    Design split and double exposure for contact hole printing at 0.40 k1 and beyond

    Köhler, Carsten
    ;
    van Praagh, Judith
    ;
    Finders, Jo
    ;
    Wiaux, Vincent  
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2004, Proceedings 41st Interface Symposium, 26/09/2004

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