Browsing by Author "van Putten, Michel"
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Publication First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials
Publication Lifetime test on EUV photomask with EBL2
Proceedings paper2019-05, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology, 16/04/2019, p.111780E