Browsing by Author "van Setten, Michiel J."
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Publication In-Poor IGZO: Superior Resilience to Hydrogen in Forming Gas Anneal and PBTI
Journal article2025-APR 28, ACS APPLIED ELECTRONIC MATERIALSPublication Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments
Journal article2025-JAN 14, ACS APPLIED POLYMER MATERIALSPublication Spinel IGZO deposition on optimized GZO templates
Journal article2025-APR, JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, (36) 10