Publication:
Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments
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265 since deposited on 2025-01-20
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Acq. date: 2026-01-06
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265 since deposited on 2025-01-20
4last month
2last week
Acq. date: 2026-01-06
Citations