Publication:

Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments

Date

2025-JAN 14

Journal article

https://doi.org/10.1021/acsapm.4c03223

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Author(s)

Sajjadian, Faegheh S.

;

Laffert, Valentin

;

Singh, Dhirendra P.

;

;

Pollentier, Ivan

;

Richter, Robert

;

van Setten, Michiel J.

;

De Gendt, Stefan

;

Conard, Thierry

;

Holzmeier, Fabian

Journal

ACS APPLIED POLYMER MATERIALS

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265 since deposited on 2025-01-20

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Acq. date: 2026-01-27