Publication:
Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments
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284 since deposited on 2025-01-20
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Acq. date: 2026-10-09
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Statistics
Views
284 since deposited on 2025-01-20
6last month
4last week
Acq. date: 2026-10-09
Citations