Publication:

Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments

Date

2025
Journal article
https://doi.org/10.1021/acsapm.4c03223
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dc.contributor.authorSajjadian, Faegheh
dc.contributor.authorvon Laffert, Valentin
dc.contributor.authorSingh, Dhirendra
dc.contributor.authorGalleni, Laura
dc.contributor.authorPollentier, Ivan
dc.contributor.authorRichter, Robert
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorConard, Thierry
dc.contributor.authorHolzmeier, Fabian
dc.contributor.imecauthorSajjadian, Faegheh S.
dc.contributor.imecauthorLaffert, Valentin
dc.contributor.imecauthorSingh, Dhirendra P.
dc.contributor.imecauthorGalleni, Laura
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorvan Setten, Michiel J.
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHolzmeier, Fabian
dc.contributor.orcidimecGalleni, Laura::0000-0002-6675-7829
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHolzmeier, Fabian::0000-0001-8749-5330
dc.date.accessioned2025-01-20T18:25:36Z
dc.date.available2025-01-20T18:25:36Z
dc.date.issued2025
dc.identifier.doi10.1021/acsapm.4c03223
dc.identifier.issn2637-6105
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45099
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage779
dc.source.endpage789
dc.source.issue2
dc.source.journalACS APPLIED POLYMER MATERIALS
dc.source.numberofpages11
dc.source.volume7
dc.subject.keywordsBASIS-SETS
dc.subject.keywordsPHOTOEMISSION-SPECTROSCOPY
dc.subject.keywordsCHEMICAL AMPLIFICATION
dc.subject.keywordsSECONDARY ELECTRONS
dc.subject.keywordsENERGY
dc.subject.keywordsDESIGN
dc.title

Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments

dc.typeJournal article
dspace.entity.typePublication
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