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Browsing by Author "van Zijl, J."

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    Tantalum-based gate electrode metals for advanced CMOS devices

    Hooker, Jacob
    ;
    Lander, Rob
    ;
    Cubaynes, Florence
    ;
    Schram, Tom  
    ;
    Roozeboom, F.
    ;
    van Zijl, J.
    ;
    Maas, M.
    Proceedings paper
    2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.215-224

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