Publication:

Tantalum-based gate electrode metals for advanced CMOS devices

Date

2005

Proceedings Paper

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Author(s)

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Cubaynes, Florence

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van den Heuvel, F.C.

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van Berkum, J.G.M.

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Henson, Kirklen

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Schaekers, Marc

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Van Ammel, Annemie

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Metrics

1969 since deposited on 2021-10-16

Acq. date: 2025-12-09