Browsing by Author "van Zijl, Jeroen"
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Publication Materials and electrical characterization of metal gate electrodes on high-k dielectrics for advanced CMOS technologies
Proceedings paper2002, Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials - SSDM, 17/09/2002, p.174-175Publication Shallow junctions for sub-100 nm CMOS technology