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Materials and electrical characterization of metal gate electrodes on high-k dielectrics for advanced CMOS technologies
Publication:
Materials and electrical characterization of metal gate electrodes on high-k dielectrics for advanced CMOS technologies
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hooker, Jacob
;
Lander, Rob
;
Rittersma, Chris
;
Schram, Tom
;
Lujan, Guilherme
;
van Zijl, Jeroen
;
van den Heuvel, Eric
;
Roozeboom, Fred
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1948
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1948
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations