Browsing by Author "van de Kerkhof, Mark"

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Advanced EUV patterning of 2D TMDs for CMOS integration

Faramarzi, Vina
;
de Poortere, Etienne
;
Venugopalan, Syam Parayil
;
Woltgens, Pieter
Proceedings paper
2024, Conference on Novel Patterning Technologies, FEB 26-29, 2024, p.129660I
Validation of imaging benefits of Dual Monopole exposures

Brunner, Timothy A.
;
Franke, Joern-Holger
;
Truffert, Vincent
;
De Bisschop, Peter
Proceedings paper
2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275006