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Browsing by Author "van de Kerkhof, Mark A.."

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    EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction

    Bekaert, Joost  
    ;
    De Bisschop, Peter  
    ;
    Beral, Christophe  
    ;
    Hendrickx, Eric  
    ;
    van de Kerkhof, Mark A..
    Journal article
    2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 4, p.41013

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