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Browsing by Author "van de Kerkhove, Jeroen"

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    Voltage contrast determination of design rules at the limits of EUV single patterning

    Blanco, Victor  
    ;
    De Poortere, Etienne P.
    ;
    Leray, Philippe  
    ;
    Cerbu, Dorin  
    ;
    van de Kerkhove, Jeroen
    Journal article
    2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041604

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