Browsing by Author "van der Groen, Sonja"
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Publication Bonding techniques for single crystal TFT AMLCD's
Proceedings paper1996, Microelectronic Structures and MEMS for Optical Processing II, 14/10/1996, p.194-200Publication CMOS compatible wafer scale adhesive bonding for circuit transfer
Proceedings paper1997, International Conference on Solid-State Sensors and Actuators - Transducers, 16/06/1997, p.629-632Publication CMOS-based sensors and actuators
Proceedings paper1998, Proceedings of the 11th Annual IEEE International ASIC Conference, 13/09/1998, p.393-397Publication CMOS-based transducers
Proceedings paper1998, Micro System Technologies 98 - 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components, 1/12/1998, p.367-372Publication Critical issues in the integration of Copper and low-k dielectrics
Proceedings paper1999, Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA., p.262-264Publication Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies
Proceedings paper1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium., p.164-167Publication Substrate bonding techniques for CMOS processed wafers
Journal article1997, Journal of Micromechanics and Microengineering, (7) 3, p.108-110Publication Substrate bonding techniques for CMOS processed wafers
Proceedings paper1996, 7th Micromechanics Europe Workshop - MME, 21/10/1996, p.12-15Publication Techniques for substrate bonding
Proceedings paper1996, Micro System Technologies 96; 5th International Conferenceon Micro Electro, Opto, Mechanical Systems and Components, 17/09/1996, p.762-764