Publication:

Critical issues in the integration of Copper and low-k dielectrics

Date

1999

Proceedings Paper

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Author(s)

;

Coenegrachts, Bart

;

;

Struyf, Herbert

;

Vanhaelemeersch, Serge

;

;

Richard, Emmanuel

;

;

;

Grillaert, Joost

;

van der Groen, Sonja

;

Stucchi, Michele

;

De Roest, David

Metrics

1996 since deposited on 2021-10-06

Acq. date: 2026-01-11