Critical issues in the integration of Copper and low-k dielectrics

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Author(s)

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Coenegrachts, Bart

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Struyf, Herbert

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Vanhaelemeersch, Serge

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Richard, Emmanuel

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Grillaert, Joost

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van der Groen, Sonja

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Stucchi, Michele

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De Roest, David

Metrics

1994 since deposited on 2021-10-06

Acq. date: 2025-10-23