Browsing by Author "van der Hilst, J. B. C."
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Publication Bottom-ARC optimization methodology for 0.25μm lithography and beyond
Proceedings paper1998, Optical Microlithography XI, 25/02/1998, p.322-336Publication Optimisation of bottom-ARC processes with respect to CD control
Journal article1998, Future Fab International, 5, p.205-210