Browsing by Author "van der Sanden, Stefan"
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Publication Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE
Proceedings paper2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022, p.Art. 122920JPublication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550O