Browsing by Author "van der marel, C."
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Publication Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrode
Oral presentation2005, MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility SemiconductorsPublication Plasma nitridation optimization sub-15A gate dielectrics
Proceedings paper2003, Silicon Nitride and Silicon Dioxide Thin Insulating Films VII, 28/04/2003, p.595-604Publication Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics