Browsing by Author "von Sprekelsen, M."
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Publication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Assessing the performance of two-dimensional dopant profiling techniques
Journal article2004, Journal of Vacuum Science and Technology, (22) 1, p.385-393