Browsing by author "Mantl, S"
Now showing items 1-5 of 5
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Investigation of plasma hydrogenation and trapping mechanism for layer transfer
Chen, Peng; Chu, Paul K.; Hochbauer, T.; Lee, J-K; Nastasi, M.; Buca, D.; Mantl, S; Loo, Roger; Caymax, Matty; Alford, T.; Mayer, J.W.; David Theodore, N.; Cai, M.; Schmidt, B.; Lau, S.S. (2005) -
Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)
Mantl, S; Buca, D.; Feste, S.; Hollander, B.; Lenk, St.; Loo, Roger; Caymax, Matty; Carius, R.; Schaefer, H. (2005-05) -
Reduction of silicon dioxide interfacial layer to 4.6 Å EOT by Al remote scavenging in high-j/metal gate stacks on Si
Nichau, Alexander; Schafer, A.; Knoll, L.; Wirths, S.; Schram, Tom; Ragnarsson, Lars-Ake; Schubert, J.; Bernardy, P.; Luysberg, M.; Besmehn, A.; Breuer, U.; Bucca, D.; Mantl, S (2013) -
Relaxation of strained pseudomorphic SixGe1-x layers on He-implanted Si/d-Si:C/Si(100) substrates
Buca, D; Minamisawa, R A; Trinkaus, H; Hollander, B; Mantl, S; Loo, Roger; Nguyen, Duy (2009) -
Si+ ion implantation for strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures
Buca, Daniel; Minamisawa, R.A.; Trinkaus, H; Mantl, S; Loo, Roger; Caymax, Matty (2009)