Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

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Authors
Mantl, S; Buca, D.; Feste, S.; Hollander, B.; Lenk, St.; Loo, Roger; Caymax, Matty; Carius, R.; Schaefer, H.
Conference
4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4
Title
Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)
Publication type
Proceedings paper
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