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Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

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dc.contributor.authorMantl, S
dc.contributor.authorBuca, D.
dc.contributor.authorFeste, S.
dc.contributor.authorHollander, B.
dc.contributor.authorLenk, St.
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorCarius, R.
dc.contributor.authorSchaefer, H.
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-16T03:15:09Z
dc.date.available2021-10-16T03:15:09Z
dc.date.issued2005-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10846
dc.source.beginpage36
dc.source.conference4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4
dc.source.conferencedate23/05/2005
dc.source.conferencelocationHyogo Japan
dc.source.endpage37
dc.title

Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

dc.typeProceedings paper
dspace.entity.typePublication
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