Browsing by author "Hellin Rico, Raquel"
Now showing items 1-4 of 4
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A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C
Hellin Rico, Raquel; Celis, Jean-Pierre; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann (2007) -
Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
Hellin Rico, Raquel; Du Bois, Bert; Celis, Jean-Pierre; Witvrouw, Ann (2004) -
Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid
Hellin Rico, Raquel; Du Bois, Bert; Witvrouw, Ann; Van Hoof, Chris; Celis, Jean-Pierre (2007) -
Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
Hellin Rico, Raquel (2010-02)