Publication:
A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C
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1861 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-06
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Statistics
Views
1861 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-06
Citations