Browsing by author "Anantha, Vidyasagar"
Now showing items 1-3 of 3
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EUV reticle print verification with advanced broadband optical wafer inspection and e-beam review systems
De Simone, Danilo; Sanapala, Ravikumar; Andrrew, Cross; Preil, Moshe; Qian, Jin; Sumar, Shishir; Anantha, Vidyasagar; Sah, Kaushik; Eitapence, Scott; Van Den Heuvel, Dieter; Foubert, Philippe (2017) -
EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems
Sah, Kaushik; Cross, Andrew; Plihal, Martin; Anantha, Vidyasagar; Babulnath, Raghav; Fung, Derek; De Bisschop, Peter; Halder, Sandip (2018) -
High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification
Cross, Andrew; Sah, Kaushik; Anantha, Vidyasagar; Gupta, Balarka; Ynzunza, Ramon; Troy, Neil; Wu, Kenong; Babulnath, Raghav; Rajendran, Meghna; Van den Heuvel, Dieter; Leray, Philippe (2020)