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High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification
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Authors
Cross, Andrew
;
Sah, Kaushik
;
Anantha, Vidyasagar
;
Gupta, Balarka
;
Ynzunza, Ramon
;
Troy, Neil
;
Wu, Kenong
;
Babulnath, Raghav
;
Rajendran, Meghna
;
Van den Heuvel, Dieter
;
Leray, Philippe
DOI
10.1117/12.2572912
EISBN
978-1-5106-3843-3
ISSN
0277-786X
Conference
Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
11517
Title
High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification
Publication type
Proceedings paper
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Conference contributions
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Item
Date
Summary
2
20.500.12860/38080.2
*
2022-01-27T10:15:04Z
validation by library/open access desk
1
20.500.12860/38080
2021-11-02T16:03:40Z
*Selected version
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